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Leveraging SEMI standards 

Enabling smart manufacturing in existing facilities 

These slides were presented at SEMICON Japan 2016.

The emerging IoT market is driving the growth of 200mm fabs which have traditionally not embraced the level of automation found in 300mm manufacturing facilities. However, as the demand for low-cost devices increases, better manufacturing control is becoming a must for all fabs. Emerging smart manufacturing technologies hold the promise of providing the flexibility required to respond rapidly and cost-effectively in both high-volume/low-mix and high-volume/high-mix production environments. However, adding such technologies can be challenging to implement in facilities with existing equipment and manufacturing operation systems that do not support easy customizations. This discussion proposes an architecture that leverages existing SEMI standards to retrofit a fab with the latest big data and analysis capabilities but without impacting existing equipment and operations. 


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  • 150+
    OEM customers
  • 50,000+
    equipment connections in service
  • 70+
    tool platforms automated
  • 40+
    fab acceptances