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Interface A (EDA)

High-volume data for improving throughput and quality

Equipment Data Acquisition (EDA) helps address the increasing demand for big data applications that analyze real-time information reported by equipment, in order to improve throughput and quality. While the standard GEM interface using SECS-II messaging does support a fair amount of data publication from the equipment, its primary purpose is to run tools without local operators present; data publication should not interfere with remote control. The suite of EDA standards (SEMI E120, SEMI E121, SEMI E125SEMI E128, SEMI E132, SEMI E134, SEMI E138, SEMI E145, SEMI E164) is also sometimes referred to as “Interface A.” These standards define an alternate channel for high-volume data publication from the tool and data collection from any EDA client/consumer, such as the factory host. Occasionally, SEMI will set an EDA “freeze” date, so that fabs can take advantage of new functionality introduced across this suite of standards. 

Communication between the equipment and its EDA clients is implemented over a well-defined XML/SOAP interface. Authenticated clients can request the data of interest, or interrogate the tools to see what data is available. To make it possible for EDA clients to gather data from any type of equipment, a Common Equipment Model (CEM) must be defined for each tool, which provides a structured view of the equipment, its physical hardware and logical software components, and all the data that they can provide: objects, attributes (variables), events, and exceptions (alarms). This typically includes all the data mandated by the SEMI standards a tool supports through the SECS interface, as well as additional hardware or process-specific data such as sensor readings and processing results. EDA clients can then define custom Data Collection Plans to retrieve the equipment data that is relevant to them.