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EIB Factory release history

EIB 7.6 - Current Release

Release information

Version:
7.6
Release Date:
March 2, 2017
Customer Support:
support.connectivity@peergroup.com

 
What’s new in this release

This release of EIB® focuses on flexibly and cost savings opportunities in manufacturing with support for logical Internal Buffer partitions and various enhancements to accelerate solution development.

Batch processing equipment: logical partitions for internal buffers

EIB has enhanced its support for batch processing equipment to support logical modelling of internal buffer partitions, as defined by the E87 Carrier Management standard. As in past releases, equipment models can be configured with multiple internal carrier locations to accurately represent the physical equipment, but now it is also possible to define multiple logical internal carrier locations. 

Logical internal buffer partitions can be utilized for additional flexibility and control over carrier management; and subsequently substrate processing. This improved flexibility allows factories to further characterize carriers and leverage that information for prioritizing material processing for Smart Manufacturing.

Model Builder: accelerating model generation

Model Builder has been enhanced with focus on accelerating equipment model generation, including:

  • Improved data import from our test application CCS Envoy™ or from CSV files (comma separated value file). Both types of files can be used to efficiently share electronically equipment configuration information between OEMs and factories, and expedite the creation of a tool model.
  • Improved tool model validation feedback for immediate visibility into specific model errors. 
  • Model Builder’s Inversion feature can be used to quickly create a factory station controller tool model from an OEM tool model, or vice versa. These models can be used for production or for testing purposes such as building an equipment simulator. Improvements have been made in data conversion to better streamline the creation of a complete inverted tool model.

Large recipe support: .NET client sample for accelerated implementation

EIB provides complete support for all types of process programs, be it formatted, unformatted, large-formatted, or large-unformatted. With EIB 7.6, large process program support has been expanded with updates to our .NET Client sample and our documentation suite. These changes make it easier to understand, implement, and test large recipe functionality. 

General improvements

Many enhancements and customer-logged issues were addressed in this release. Please refer to the Release Notes or contact us for details.

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EIB 7.5

Release information

Version:
7.5
Release Date:
July 29, 2016
Customer Support:
support.connectivity@peergroup.com

 
What’s new in this release

Flexible Material Management 

The latest version of EIB provides flexibility for supporting additional material types.

Semiconductor equipment vendors leverage the E90 SEMI standard to provide tracking and data reporting for the substrates within the tool. As equipment evolves there are occasions when more flexibility is needed for supporting additional material types – such as reticles, filler wafers, thin wafer holders, and satellites – whose use is not part of a SEMI standard. In this release, EIB® provides flexibility to manage more material types.

EIB has extended its support of the SEMI E90 Substrate Tracking standard to include flexible material type support; this is an addition to the existing support of the SEMI-compliant substrate material. Available for 300mm implementations, both factory and OEM’s can easily add additional E90 substrate objects in their tool model to leverage all of the tracking and data reporting capabilities defined by the standard. Process jobs can be defined and executed for mixed material types, and data reporting can be customized to track and report on different data sets between the different material types. Equipment models can be configured with material locations that support more than one material type, ensuring that the model accurately represents the physical equipment. 

Notification System Enhancement: Warning thresholds for the Client Notificaion Queue

Factory deployments consist of many applications with different performance levels, and in some scenarios client software may be unable to keep up with the equipment data being published from EIB. In order to better support applications with lower throughput capacity, the EIB notification system has been enhanced to include new warning thresholds that provide-real time notifications if the client notification queue approaches its limit.  With the new warning thresholds configured, the EIB notification system will raise an alarm if the client notification queue reaches either the warning or critical threshold. These alarms provide transparency into the state of the client notification queue and cross-application communication, resulting in the insight for host solutions to better manage these scenarios.

SEMI Standard Support 

Our products continue to adopt new versions of the SEMI standards, enabling our customers to be compliant as the standards are approved.

The 0416 version of E30 has added support for two new messages: S1F21 (Data Variable Namelist Request) and S1F23 (Collection Event Namelist Request). In this release of EIB, these messages are now supported for factory; they had been previously supported for OEM. EIB now supports the 0416 version of the E30 Generic Model of Communication and Control of Manufacturing Equipment (GEM) standard, for both factory and OEM implementations.

General improvements

Many enhancements and customer-logged issues were addressed in this release.  Please refer to the Release Notes or contact us for details.

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EIB 7.4

Release information

Version:
7.4
Release Date:
January 27, 2016
Customer Support:
support.connectivity@peergroup.com

 
What’s new in this release

E164 specification for EDA common metadata support

As manufacturing complexity increases, data collection and analysis becomes more important. The EDA (Interface A) standards enables high-rate data collection, while SEMI E164 ensures equipment information consistency which simplifies data collection plan definition and consumption by factory systems.

EIB™ provides equipment manufacturers a single, flexible, and easy to integrate solution that provides SECS communications as well as the latest EDA standard support.

Production diagnostics

Root cause analysis of production issues can be hindered by lack of information. During normal operations, capturing detailed log information is impractical, as this is only needed to analyze excursions.

EIB’s new Verbose Production Diagnostics feature can create detailed logs automatically when an excursion occurs, giving you the diagnostic information when you need it. EIB allows you to maintain production logs for regular operations, and makes it possible to gather and manage detailed error diagnostics to accelerate excursion analysis and resolution time.

Data collection monitoring

EIB’s multi-protocol design brings together data from equipment and devices, as well as process information into a single data server. With EIB’s expanded monitoring and diagnostic capabilities, data collection client applications have increased visibility to dynamically detect and respond to potential data collection error scenarios.

State and data persistence

EIB retains specific data across a restart, and this release of EIB gives you more flexibility as to what information to persist. It is now possible to configure persistence for 300mm object custom attributes, exception conditions, and clock management. This added flexibility allows you to ensure that only the information that needs to be kept across restarts is persisted, and that when EIB restarts it has the information it requires.

Technology support

Our products continue to adopt new computing technologies, enabling our customers to take advantage of new computing platforms as they become available. EIB now supports the Microsoft® Windows 10 and Microsoft® Windows Server 2012 R2 operating systems. It has also added support for Microsoft® Visual Studio 2015, and .NET Framework 4.5.1, 4.5.2 and 4.6.

General improvements

We resolved several customer-logged issues and requests for EIB. Please contact us for details.

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EIB 7.3

Release information

Version:
7.3
Release Date:
May 6, 2015
Customer Support:
support.connectivity@peergroup.com

 
What’s new in this release

PLC-based equipment

Semiconductor equipment vendors have leveraged PLC technology for years to control low-level hardware components within their equipment. EIB™ first introduced Classic OPC Data Access (DA) connectivity in version 6.1 to provide SECS/GEM communication to PLC-based equipment. The newer OPC Unified Architecture (UA) communication standards are being adopted by many players in the industry to create platform-independent embedded OPC UA servers directly on PLCs bypassing the need for a Windows-based intermediary system.

In this release, EIB has added support for OPC UA client connections in addition to the existing OPC DA implementation. OEM’s can easily add SECS/GEM communication to existing PLC-based equipment using the latest OPC UA technology or continue to use OPC DA communications with minor configuration changes.

Additionally, this release of EIB includes numerous enhancements to the existing OPC implementation to support a broad variety of OPC servers and tool implementations.

Batch processing equipment

EIB has enhanced its support for batch processing equipment to fully support internal buffer equipment as defined by the E87 Carrier Management standard.  Equipment models can be configured with multiple internal carrier locations to accurately represent the physical equipment as well as ensuring standard-compliant support for additional host requests and events to automatically track available buffer capacity within the equipment.

Technology support

Our products continue to adopt new computing technologies, enabling our customers to take advantage of new computing platforms as they become available. EIB now supports the Microsoft Windows 8.1 operating system (64 and 32-bit), and SQL Server 2014.

This also includes dropping support for older technologies. EIB no longer supports the Windows Server 2003 SP2 operating system.

General improvements

We resolved several customer-logged issues and requests for EIB. Please contact us for details.

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EIB 7.2

Release information

Version:
7.2
Release Date:
December 10, 2014
Customer Support:
support.connectivity@peergroup.com

 
What’s new in this release

Bridging data collection, storage and visualization

EIB™ already combines data from numerous sources such as sensors, PLCs, equipment control software (ECS), and station controller applications leveraging its multi-protocol design to bring together equipment and process information into a single data server.

With EIB 7.2, data collection has been expanded enabling access to more information that EIB manages such as the connection status of various communication interfaces.

EIB supports the ability to identify contextual data to associate and store with collected data giving you more insight into tool behavior. As an example, users can create solutions that capture and store alarms and events that occurred during specific recipe steps or job execution. Subsequently, data analysis applications can retrieve historical data, refined through the use of context data filters, to retrieve only data associated for specific recipes, wafers or processing job.

Historical back-end data processing and retrieval

EIB makes it easy to leverage your equipment data through a simple mechanism that integrates data consumer applications each with their own data collection and data retention requirements. We have expanded EIB’s data management capabilities in this release to allow the integration of customer-defined algorithms for manipulating and reporting stored data. With this capability, specific applications can be developed that are tightly coupled with shared back-end processing eliminating the need for client-side data manipulations, reducing transmitted data volumes and improving overall performance.

Simplifying custom parameter type integration

EIB’s flexible data modelling allows user-defined parameter types to represent the equipment’s unique data requirements. Custom parameter types within the tool model are used to define the complex data structures that are typically required for reporting measurement data or other equipment-specific information to the factory host.

To support our continued effort to simplify tool model creation, Model Builder has been enhanced to generate C# code from custom parameter type definitions. The generated C# code can be copied and pasted directly into a .cs file for use with your custom application, eliminating the need to develop application code.

Conversely, if you have already generated a DLL with your required parameter types, the DLL can be loaded into Model Builder to automatically create the parameter type definitions within your tool model.

Multiple override files

As equipment becomes more complex, the number of equipment items such as events, alarms, variables, and equipment constants continues to increase. Simplification of the tool model configuration process can help drive down development costs. In an effort to support re-use of tool models, a single tool model can now support multiple override files. This allows multiple tools with similar configurations to be built and maintained in a single tool model, with the differences encapsulated in a series of override files.

“How To” documentation for adding 300mm support to your equipment

As part of our overall goal to reduce development effort, we have introduced high-level “How To” documentation to guide equipment makers when adding 300mm capabilities to their equipment in the ECS Interface API. Our approach focuses on required configuration to augment the provided samples, required APIs to integrate, as well as diagrams that show capabilities, flow of information, and responsibilities of the host and the equipment control system. For new EIB users, you will be able to quickly understand how to leverage EIB’s capabilities and add a 300mm host to your equipment.

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EIB 7.1

Release information

Version:
7.1
Release Date:
June 4, 2014
Customer Support:
support.connectivity@peergroup.com

 
What’s new in this release

Bridging data collection, storage and visualization

EIB™ makes it easy to leverage your equipment data through a simple mechanism that integrates data consumer applications each with their own data collection and data retention requirements. We have expanded EIB’s data management capabilities in this release to allow the integration of custom data consumers into your solution, in addition to EIB’s existing SQL database data consumer for temporary data storage. With this capability, you can now employ additional storage architectures, including other database technologies, file-based storage systems, or custom storage solutions to capture data as it is collected from the equipment for real-time and historical data analysis and visualization. Besides storing data, custom data consumers also enable the integration of data analysis agents to process your data.

Automating the generation of equipment configuration

OEMs manage their equipment capabilities in many forms, such as databases, source code, or configuration files to name a few. Using EIB’s Model Builder API, users can programmatically generate equipment models using their source information and keep it synchronized with the equipment control system, thereby eliminating manual configuration and costly user errors.

Protecting intellectual property

Manufacturing process information and equipment data is important to safeguard. Access to this information needs to be protected, whether it is within the factory or shared between the manufacturer and the equipment maker. One source of information shared between fab and OEM is equipment communication logs, which are critical to help diagnose issues but can also contain sensitive information. EIB’s approach to viewing log information has been expanded in this release to allow both OEMs and fabs control over what information can be viewed and shared.

How to add GEM to your equipment

As part of our overall goal to reduce development effort, we have introduced high level “How To” documentation to guide equipment makers on how to add GEM capabilities to their equipment in the ECS Interface API. Our approach focuses on required configuration to augment the provided samples, required APIs to integrate, as well as diagrams to visually describe the capabilities and flow of information and responsibilities of the host and the equipment control system. For new EIB users, you will be able to quickly understand how to leverage EIB’s capabilities and add a GEM host to your equipment.

Technology support

Our products continue to adopt new computing technologies, enabling our customers to take advantage of new computing platforms as they become available. This also includes dropping support for older technologies. EIB no longer supports Microsoft Windows XP operating system as well as development tools of Visual Studio 2003, 2005, and .NET Framework 2.0.

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For global contact information, click on the “Sales and Support” link in the navigation menu.

EIB 7.0

Release information

Version:
7.0
Release Date:
October 31, 2013
Customer Support:
support.connectivity@peergroup.com

 
What’s new in this release

Bridging data collection, storage and visualization

As wafer sizes increase, geometries decrease, and product lifecycles become shorter, data access and analysis is critical to quickly improve process design, manufacturing quality, and equipment performance.

EIB™ easily combines data from numerous sources such as sensors, PLCs, equipment control software (ECS), and station controller applications leveraging its multiple-protocol design to bring together equipment and process information into a single data server.

With EIB 7.0, you can quickly create data collection plans and can extend your design to store the data as well. EIB’s data management infrastructure has many uses from:

  • On tool visual monitoring
  • Integration with 3rd party data analysis software
  • On tool data caching
  • Off tool data caching
  • Station controller tool or line visual monitoring

      EIB provides the framework for real-time data collection, storage, and historical analysis and can be integrated with 3rd party visualization data tools. EIB’s multi-client design facilitates tuning data collection, storage and visualization designs to individual client needs.

      Flexibility

      Standardization across the industry for host-equipment communications continues to be important to drive down integration costs, but it is also necessary for fabs and OEMs to continue to implement and adapt the standards as they make sense for their business and strategic objectives.

      EIB’s approach from day one has been to provide a flexible information bridge to communicate with any equipment type and any host. Flexibility is key to EIB’s architecture and we continue to expand our product to ensure that development and integration time is minimized regardless of the SEMI standard compliance level you are striving to meet.

      EIB 7.0 has made it simpler to integrate EIB on the host side with non-standard or partially compliant GEM and GEM 300 equipment. Station controllers can leverage the standards supported by the equipment and can quickly adapt to any non-standard messages, state model implementations, and event reporting, which enables rapid equipment integration.

      Performance improvements

      As equipment becomes more complex, the number of equipment items such as events, alarms, variables, and equipment constants continues to increase. Optimizations around model configuration time as well as equipment startup time provide you with valuable productivity gains, whether you are managing large models or using a central model management approach where instance specific capabilities are turned on or off at run time.  Optimizing performance continues to be a key focus area for EIB, and in 7.0 the Model Builder load times have decreased by 64% and initialization times have decreased by 27%.

      Persisting key production data

      It is critical that key manufacturing data is persisted across restarts of any equipment control application. The granularity of persistence control as well as the speed for data storage and retrieval is important to minimize any performance impact from persisting state. Both fabs and OEMs who use EIB may have their own storage technology in use for their application and want to minimize any processing overhead as well as installation footprint on their hardware.

      In this release of EIB, the database repository options have been expanded giving our customers the ability to leverage their own database technology or newer database technology provided with EIB. EIB now supports persisting data in its SQL Server Express database, which has proven to have superior storage and retrieval times when compared to the previous storage technology. For customers that have their own SQL Server database used by their solution, they can choose to connect to their own database for data persistence instead of using the EIB provided database, thus reducing their hardware footprint.

      Host interface guide template

      A host interface guide clearly communicates the equipment capabilities to the factory reader so that the factory understands how to interact with the equipment and integrate it with their factory systems. A key part of the equipment communications is the capture of events, alarms, variables and constants supports by the equipment. This definition is handled automatically by EIB’s Host Interface Documentation export. In addition to these definitions, the host developer needs to understand operationally when data will be valid as well as error scenarios. A template document is provided in this release with annotations to help you select key host communications items to build your host interface guide.

      Technology support

      Our products continue to adopt new computing technologies, enabling our customers to take advantage of new computing platforms as they become available. EIB now supports Windows Server 2012 operating system, and the development tools of Visual Studio 2012 and .NET Framework 4.5.

      Internationalization

      EIB has been qualified for English, Japanese, German, and French operating systems.

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      EIB 6.4

      Release information

      Version:
      6.4
      Release Date:
      June 27, 2012
      Customer Support:
      support.connectivity@peergroup.com

       
      What's new in this release

      This release of EIB™ expands support for the 300mm SEMI standards (GEM 300) providing equipment side solutions additional control over host communications. With a continued focus on reducing the time and effort required to build and deploy equipment models, we have advanced our equipment data item management giving implementers more control over the offline management and consolidation of their configuration.

      EIB GEM 300 interface

      EIB provides equipment manufacturers with a .NET GEM 300 connectivity solution that eases the task of equipment-to-host communication implementation, while complying with the SEMI GEM 300 standards (E39, E40, E87, E90, E94, E116, E148, and E157). Along with 300mm SEMI standards, EIB also supports Specific Equipment Models such as E82, E88, E91, E122, E123 and E130. This release expands the 300mm equipment side solution giving the ECS more control over host communication interactions, management of persisted data, logging flexibility and support for the latest 300mm SEMI standards.

      Managing equipment data

      Using Model Builder’s enhanced CSV import and export capabilities you can now easily leverage pre-existing equipment definitions reducing the time to configure host or equipment communications. With CSV exports, EIB enables offline editing and management of equipment IDs simplifying the effort to manage configuration across multiple tools and platforms. Exported configuration data provides the basis for generating host interface documentation necessary for factory equipment integration.

      Wafer map support

      Both factory and OEM EIB implementations support substrate, wafer and strip map SEMI standards (E142, G84 and Stream 12).

      Reducing development effort

      Configuration, code and documentation samples have been improved reducing the effort to integrate EIB into your software solution. Tool model samples provide a great starting point for modeling various equipment types and demonstrating communication with equipment or host software. For equipment makers, samples demonstrate how equipment control software enables host integration with EIB reducing your development time. 

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      EIB 6.3

      Release information

      Version:
      6.3
      Release Date:
      December 14, 2011
      Customer Support:
      support.connectivity@peergroup.com

       
      What's new in this release

      This release of EIB™ supports the latest version of the Equipment Data Acquisition (Interface A) set of standards, frozen by ISMI in July 2010, known as EDA 0710.

      EDA 0710 – Equipment Data Acquisition (Interface A)

      As manufacturing complexity increases, data collection and analysis is becoming more important. A data collection strategy that allows for high-rate data collection can be achieved using Interface A (EDA). Large data volumes and targeted data collection cannot be supported via traditional SECS/GEM communications. EIB’s Interface A has been used successfully by a growing list of factories and OEMs since 2005. With version 0710, the industry has driven changes that let OEMs reduce the effort to add Interface A onto any equipment and make it easier for factories to incorporate it into any factory system and improve their data collection strategies. Along with Interface A, EIB provides equipment manufacturers and factories a single, flexible solution for collecting and reporting data.

      Supporting multiple EDA standards

      EIB provides flexible deployment models, enabling the addition of EDA and support for multiple versions of EDA (1105, 0710) through configuration. OEMs can quickly configure Interface A to meet factory-specific requirements.

      Adding Interface A to any tool

      OEMs can quickly add EIB EDA to any tool, regardless of the existing host communications implementation. OEMs can also build a full connectivity solution with EIB offering GEM, GEM 300 and Interface A communications.

      Managing EDA metadata

      Metadata describes how the equipment information is represented to the host. It captures the logical structure of the equipment modules and the information associated with those modules. EIB simplifies the creation and sharing of the metadata between the OEM and the factory for offline data collection configuration. With PEER Group’s active involvement in the initiative to create a new standard for the existing metadata guidance, the flexibility needed for equipment modeling is built into EIB.

      Testing Interface A

      To ensure your Interface A configuration and deployment meets your needs, verification is key. With EIB’s EDA Pro Client application, you can verify host-equipment message interaction during development. In this latest EIB release, the EDA Pro Client has been upgraded to support both the 1105 and 0710 EDA standards and has expanded its tools for data collection plan creation and management as well as metadata management to reduce overall troubleshooting effort.

      Managing multiple 300mm tools

      Previous versions of EIB enabled factories and OEMs to logically model multiple equipment to consolidate communications and control. EIB’s modeling capabilities have been expanded to enable multiple 300mm equipment instances to be represented as one logical tool. This capability provides flexibility to factory station controllers to control and collect data as a unit as well as to equipment makers who need to represent multiple 300mm modules as a single tool to the host.

      Managing consolidated deployments

      Many OEMs and factories are minimizing their hardware requirements and are consolidating their deployment of connectivity solutions on a single server. EIB provides an Administration Suite to effectively manage multiple EIB instances in a centralized deployment model. The Administration Suite provides functionality for starting and stopping applications, monitoring the status of applications and publishing information about applications. The Administration Suite is written explicitly to work with EIB and Fast Framework based applications, but is fully capable of maintaining other applications.

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      EIB 6.2

      Release information

      Version:
      6.2
      Release Date:
      July 6, 2011
      Customer Support:
      support.connectivity@peergroup.com

       
      What's new in this release

      This release of EIB™ supports the newest SEMI standards demanded by the most advanced manufacturers in the semiconductor, LED and solar industries. With a continued focus on expanding interface support and reducing the time and effort to deploy EIB, we have added several enhancements based on customer requests.

      SEMI E148 – Specification for Time Synchronization and Definition of the TS-Clock Object

      The E148 standard is used to synchronize equipment computer clocks within a factory where the equipment provides time-sensitive data that requires date and time accuracy across multiple factory components.

      The time resolution and time server source requirements will vary across equipment makers and factories, making it important for connectivity solutions to support customers integrating their preferred time server solution to meet their time synchronization needs.

      SEMI E157- Specification for Module Process Tracking

      The E157 standard reports process-related data during the execution of a recipe at a processing location, which provides important context data to support applications that optimize yields and improve overall factory performance.

      SEMI PV2- Guide for PV Equipment Communication Interfaces (PVECI)

      The PV2 standard is based on E30 (GEM), providing a proven equipment automation standard refined for photovoltaic manufacturing.
       

      OPC interface

      OPC is a common communications interface used by equipment vendors in the Solar industry. The OPC Data Access Client interface introduced in EIB 6.1, which provides data collection capabilities out of the box, has been further extended to provide customizable remote control, recipe handling, control state and terminal support through an OPC server. As with other customizable features of EIB, we have provided a code sample to make it easy to take advantage of EIB’s capabilities.

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      EIB 6.1

      Release information

      Version:
      6.1
      Release Date:
      November 10, 2010
      Customer Support:
      support.connectivity@peergroup.com

       
      What's new in this release

      This release of EIB™ focuses on expanding operating system support to include Microsoft® Windows® 7 and Windows Server 2008, providing versions of the product that support integration with 32-bit or 64-bit implementations, reducing the time and effort required to build and deploy equipment models, expanding SECS/GEM capabilities when used for in-tool integration with the equipment control system, and several product enhancements based on customer requests.

      Operating system support

      EIB now supports Microsoft Windows 7 (32-bit and 64-bit), Windows Server 2008 SP2 and Windows Server 2008 R2, in addition to Windows XP SP3 and Windows Server 2003 SP2.

      Native 64-bit support

      Users can now take advantage of the latest advances in computer hardware and operating systems using the native 64-bit version of EIB.

      Increased equipment model creation and deployment efficiency

      Creating reusable and extendable tool models has never been faster with features that include:

      • Model Builder’s new drag-and-drop user-interface, which includes integrated online help that provides information about how to perform specific tasks.
      • Model creation wizards that provide users with a base tool model tailored to their deployment needs – host, EDA or in-tool GEM solutions.
      • Integrated automation tools - Auto Model Builder and Composite Model Creator - to query configurations directly from the equipment and to combine individual equipment models into a linked model configuration.
      • Importing capabilities that leverage your existing tool configurations in PEER FACTORY® Acceptance Tester (PFAT™) and GWGEM®, creating your equipment model automatically.
      • Model Builder’s new override capabilities, which allow users to define a single tool model that can then be deployed to specific instances where slight customizations are required, such as specifying the IP address, TCP port, and Device ID of a SECS/GEM interface.
      You can ensure that your model has been configured correctly prior to deployment using Model Builder’s enhanced validation capabilities, which inspects and verifies the entire model.
       

      OPC interface 

      OPC is a common communications interface used by equipment vendors in the Solar industry. EIB, which is able to communicate via any protocol, has expanded its set of predefined communications interfaces to support OPC, in addition to SECS and ASCII. The new OPC Data Access Client interface provides data collection capabilities out of the box and can be extended to meet specific tool requirements.

      EIB GEM interface

      EIB now provides equipment manufacturers with a .NET SECS/GEM connectivity solution that eases the task of equipment-to-host communication implementation, while complying with the SEMI Generic Equipment Model (GEM) standard. EIB supports 100% of SECS/GEM capabilities as specified in the latest published E30 SEMI standard.Equipment manufacturers can now publish module and equipment level performance tracking as specified in the latest published E116 SEMI standard. EIB now supports transferring large recipes and data sets using Stream 13 data sets, as defined in E5 and E30. Recipe and data set requests may originate with the Host or the ECS. Large recipes support both upload and download.

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      • 150+
        OEM customers
      • 50,000+
        equipment connections in service
      • 70+
        tool platforms automated
      • 40+
        fab acceptances